JPH03785B2 - - Google Patents

Info

Publication number
JPH03785B2
JPH03785B2 JP26750885A JP26750885A JPH03785B2 JP H03785 B2 JPH03785 B2 JP H03785B2 JP 26750885 A JP26750885 A JP 26750885A JP 26750885 A JP26750885 A JP 26750885A JP H03785 B2 JPH03785 B2 JP H03785B2
Authority
JP
Japan
Prior art keywords
thin plate
wafer
rotating
holder
notch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP26750885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62128142A (ja
Inventor
Takashi Myake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Canon Marketing Japan Inc
Original Assignee
Canon Inc
Canon Hanbai KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc, Canon Hanbai KK filed Critical Canon Inc
Priority to JP26750885A priority Critical patent/JPS62128142A/ja
Publication of JPS62128142A publication Critical patent/JPS62128142A/ja
Publication of JPH03785B2 publication Critical patent/JPH03785B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
JP26750885A 1985-11-29 1985-11-29 薄板状物体の回転装置 Granted JPS62128142A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26750885A JPS62128142A (ja) 1985-11-29 1985-11-29 薄板状物体の回転装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26750885A JPS62128142A (ja) 1985-11-29 1985-11-29 薄板状物体の回転装置

Publications (2)

Publication Number Publication Date
JPS62128142A JPS62128142A (ja) 1987-06-10
JPH03785B2 true JPH03785B2 (en]) 1991-01-08

Family

ID=17445814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26750885A Granted JPS62128142A (ja) 1985-11-29 1985-11-29 薄板状物体の回転装置

Country Status (1)

Country Link
JP (1) JPS62128142A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7350315B2 (en) * 2003-12-22 2008-04-01 Lam Research Corporation Edge wheel dry manifold
JP5042655B2 (ja) * 2007-02-08 2012-10-03 昭和電工株式会社 基板の乾燥装置およびホルダー
JP6376778B2 (ja) * 2014-03-04 2018-08-22 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置

Also Published As

Publication number Publication date
JPS62128142A (ja) 1987-06-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term